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The dimensions of the angular velocity is in rad/s. The linear acceleration goes with m/s^2. As far the covariance goes it means that how two random variables change with respect to each other, So in this case it means that how much change in a particular dimension is linked to the other. As an example the covariance between X and Y dimension, similarly X and Z , Y and Z and so on. It does not mean between different sensors.

As far the units of the covariance matrix is concerned i think it is in the same units as that of the measurement it is associated with.

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